JPH0183337U - - Google Patents

Info

Publication number
JPH0183337U
JPH0183337U JP1987179795U JP17979587U JPH0183337U JP H0183337 U JPH0183337 U JP H0183337U JP 1987179795 U JP1987179795 U JP 1987179795U JP 17979587 U JP17979587 U JP 17979587U JP H0183337 U JPH0183337 U JP H0183337U
Authority
JP
Japan
Prior art keywords
chuck
contact aligner
substrate
main plane
lowered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987179795U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987179795U priority Critical patent/JPH0183337U/ja
Publication of JPH0183337U publication Critical patent/JPH0183337U/ja
Pending legal-status Critical Current

Links

JP1987179795U 1987-11-26 1987-11-26 Pending JPH0183337U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179795U JPH0183337U (en]) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179795U JPH0183337U (en]) 1987-11-26 1987-11-26

Publications (1)

Publication Number Publication Date
JPH0183337U true JPH0183337U (en]) 1989-06-02

Family

ID=31471337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179795U Pending JPH0183337U (en]) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0183337U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151426A (ja) * 1983-01-21 1984-08-29 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 薄い基板を写真平版処理する装置
JPS609125A (ja) * 1983-06-29 1985-01-18 Hitachi Ltd パターン焼付け装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151426A (ja) * 1983-01-21 1984-08-29 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 薄い基板を写真平版処理する装置
JPS609125A (ja) * 1983-06-29 1985-01-18 Hitachi Ltd パターン焼付け装置

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